8b, c. The data that support the findings of this study are available from the corresponding author upon reasonable request. Mercante, A. J. et al. Kues, M. et al. fabricated the device. 25, 458460 (1974). Electron-plasmon interaction on lithium niobate with gold nanolayer and its field distribution dependent modulation. IEEE Photonics Technol. Here we overcome these limitations and demonstrate monolithically integrated lithium niobate electro-optic modulators that feature a CMOS-compatible drive voltage, support data rates up to 210. Google Scholar. Appl. conceived the experiment. Laser Photonics Rev. Quantum Electron. Carlson, D. R. et al. For example, the capacitance of our device can be significantly decreased since the majority of the metallic parts in the current devices are used for coupling the RF driving signal, which can be removed in a future on-chip integration design. Google Scholar. Haffner, C. et al. Optica 6, 845853 (2019). Femtofarad optoelectronic integration demonstrating energy-saving signal conversion and nonlinear functions. Open Access articles citing this article. a is the lattice constant. When the EOM is driven at a modulation frequency of 600MHz much smaller than the cavity linewidth of 1.4GHz, increasing the driving power simply broadens the transmission spectrum into one with two shallow side lobes, as shown in Fig. and M.L. Jiang, W. et al. 314, 317 (2014). Express 26, 1481014816 (2018). (Credit: Second Bay Studios/Harvard SEAS). Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon. Google Scholar. 12, 1700256 (2018). The large metal pads (highlighted in blue box) are used simply as the contacts for the air-coplanar probe (Formfactor Acp65-A-GSG-100) for applying the RF driving signal (see also the inset of Fig. Nature thanks M. Hochberg and the other anonymous reviewer(s) for their contribution to the peer review of this work. Photonics 2, 433437 (2008). To show this feature, we selected another similar device on the same chip, which has a lower loaded optical Q of 14,000. Using the Lithium Niobate Modulator: Electro-Optical and Mechanical Connections Introduction The purpose of this document is to describe how to use a Lucent Technologies Lithium Niobate (LiNbO 3 ) modulator. volume11, Articlenumber:4123 (2020) Photonics 1, 407410 (2007). Express 22, 2862328634 (2014). Photon. Get the most important science stories of the day, free in your inbox. On-chip generation of high-dimensional entangled quantum states and their coherent control. Provided by the Springer Nature SharedIt content-sharing initiative. Thin film lithium niobate electro-optic modulator with terahertz operating bandwidth. Figure3 illustrates the schematic of the experimental testing setup, where the inset shows an optical image of the device with the RF probe in contact. The photonic-crystal hole structure was patterned with ZEP-520A positive resist via electron-beam lithography, which was then transferred to the LN layer with an Ar+ plasma milling process to etch down the full 300-nm depth. The sum of all gray curves is showed in red, which is fitted by the theory. Light is coupled into and out of the EOM chip via one lensed fiber. 101, 151117 (2012). 34, 29412951 (2016). ADS 8c) due to the decrease of optical mode confinement. The on-chip laser is combined with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. Wideband thin-film lithium niobate modulator with low half-wave-voltage length product. Such a supercell of metasurface is constructed by two kinds of finite-sized arrays possessing different topological properties via the generalized two-dimensional (2D . These authors contributed equally: Cheng Wang, Mian Zhang, John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, MA, USA, Cheng Wang,Mian Zhang,Maxime Bertrand,Amirhassan Shams-Ansari&Marko Lonar, Department of Electronic Engineering, City University of Hong Kong, Kowloon, Hong Kong, China, Xi Chen,Sethumadhavan Chandrasekhar&Peter Winzer, LP2N, Institut dOptique Graduate School, CNRS, University of Bordeaux, Talence, France, Department of Electrical Engineering and Computer Science, Howard University, Washington, DC, USA, You can also search for this author in The device also exhibits a second-order TE-like cavity mode \({\mathrm{{TE}}}_{01}^{1}\) (Fig. C.W., M.Z., X.C., P.W. & Smith, B. J. Bandwidth manipulation of quantum light by an electro-optic time lens. 27 March 2023, Receive 51 print issues and online access, Get just this article for as long as you need it, Prices may be subject to local taxes which are calculated during checkout. & Thomson, D. J. High-speed plasmonic modulator in a single metal layer. Chen, L., Wood, M. G. & Reano, R. M. 12.5 pm/V hybrid silicon and lithium niobate optical microring resonator with integrated electrodes. & Capmany, J. a Recorded transmission spectrum of the EOM cavity as a function of applied DC voltage from 0 to 4.5V, with a voltage step of 0.5V. b Recorded resonance shift as a function of applied DC voltage, where the experimental data are shown in black dots and the blue line is a linear fitting to the data. Express 23, 2274622752 (2015). By submitting a comment you agree to abide by our Terms and Community Guidelines. Wooten, E. L. et al. Lithium niobate piezo-optomechanical crystals. Science 298, 14011403 (2002). Lithium niobate (LiNbO3) modulator can be regarded as a technology platform that can add values to optical networks and is suitable for addressing many issues. As shown in Fig. Photonics 13, 454459 (2019). Nat. CAS High performance optical modulator based on electro-optic polymer filled silicon slot photonic crystal waveguide. Photon. You are using a browser version with limited support for CSS. Publishers note: Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. By combining thin-film lithium niobate devices with high-power lasers using an industry-friendly process, this research represents a key step towards large-scale, low-cost, and high-performance transmitter arrays and optical networks. A variety of approaches have been explored for this purpose, including plasmonic structures29,30, slotted dielectric waveguides10, photonic micro-/nanoresonators6,31, etc. Cai, L. et al. Rev. View Spotlight analysis of the #OPG_JOSA_B paper Spiral waveguide Bragg grating modulator on thin-film Z-cut lithium niobate http://ow.ly/NsJS50NVr0m Spotlight . Fortier, T. M. et al. Recently, thin-film lithium niobate (LN) emerges as a promising platform for photonic integrated circuits. Nat. Dylan Renaud, Daniel Rimoli Assumpcao, Marko Loncar, Emma Lomonte, Martin A. Wolff, Francesco Lenzini, Qiushi Guo, Ryoto Sekine, Alireza Marandi, Minh A. Tran, Chong Zhang, Tin Komljenovic, Timothy P. McKenna, Hubert S. Stokowski, Amir H. Safavi-Naeini, Kengo Nozaki, Shinji Matsuo, Masaya Notomi, Nature Communications Recently, there have been significant advance in high-Q LN photonic-crystal nanoresonators43,44,45,46, which led to the demonstration of intriguing phenomena and functionalities such as photorefraction quenching43, harmonic generation44, piezo-optomechanics45, and all-optical resonance tuning46. If you find something abusive or that does not comply with our terms or guidelines please flag it as inappropriate. Opt. We provide a standard modulator package, as well as customized modulator chips, packages and services for integration . Extended Data Fig. Photonics 13, 8090 (2019). M.L. Thinfilm lithium niobate (TFLN) has been widely used in electrooptic modulators, acousticoptic modulators, electrooptic frequency combs and nonlinear wavelength converters owing to the. Opt. 35, 346396 (2017). However, negligible degradation observed between Fig. d Cross-sectional schematic of the EOM structure, where the arrow profile shows the radio frequency (RF) electric field distribution and the color profile shows the optical cavity mode field distribution, both simulated by the FEM method. Tanabe, T., Nishiguchi, K., Kuramochi, E. & Notomi, M. Low power and fast electro-optic silicon modulator with lateral p-i-n embedded photonic crystal nanocavity. When the modulation frequency is below 1.0GHz, The transmission spectrum remains fairly similar regardless of modulation frequency, as expected from the adiabatic driving discussed above. This series of Lithium Niobate fiberoptic Modulators is designed for laboratory test use. Mercante, A. J. et al. Janner, D., Tulli, D., Garca-Granda, M., Belmonte, M. & Pruneri, V. Micro-structured integrated electro-optic LiNbO3 modulators. A review of lithium niobate modulators for fiber-optic communications systems. Herein, we review the progress in microstructure and domain. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages. Gap denotes the spacing between the gold electrode and the LN cavity, and tw denotes the thickness of the waveguide wing layer. For all the recent advances in integrated lithium niobate photonic circuits from frequency combs to frequency converters and modulators one big component has remained frustratingly difficult to integrate: lasers. 3). Opt. Technol. Express 20, 29742981 (2012). Lett. Chen, X. et al. On the other hand, the full-swing extinction ratio of the EOMs is primarily determined by the external coupling of light to the modulator cavity. Express 21, 3035030357 (2013). J. Lightwave Technol. ISSN 0028-0836 (print). High-Q photonic resonators and electro-optic coupling using silicon-on-lithium-niobate. PubMedGoogle Scholar. Article Wolf, S. et al. For example, LNOI phase modulators with relatively low We believe this is the first LN EOM ever reported with such combined device characteristics and modulation performance. Marko Lonar. 8b. b, c Eye diagrams of the photonic-crystal EOM output, measured with 271 NRZ PRBS with a driving voltage of Vpp=2V. The laser wavelength was locked at half wave into the cavity resonance. 41, 57005703 (2016). Figure 1: Dual-drive system layout You are using a browser version with limited support for CSS. Integrated microwave photonics. Preprint at https://arxiv.org/abs/1803.10365 (2018). Science 358, 630632 (2017). This work is supported in part by National Science Foundation (NSF) (EFMA-1641099, ECCS-1810169, and ECCS-1842691); the Defense Threat Reduction Agency-Joint Science and Technology Office for Chemical and Biological Defense (grant No. 1f). Electro-optic modulator (EOM) takes a vital role in connecting the electric and optical fields. The authors declare no competing interests. ISSN 1476-4687 (online) LiNbO. As shown in Fig. Long haul telecommunication networks, data center optical interconnects, and microwave photonic systems all rely on lasers to generate an optical carrier used in data transmission. Science 318, 15671570 (2007). Appl. B 97, 104105 (2018). 6, 6982 (2000). Over 67GHz bandwidth and 1.5V InP-based optical IQ modulator with nipn heterostructure. Its low operating voltage makes it convenient to use a function generator as the driver. 8b, increasing the thickness, tw, of the wing layer will improve the electro-optic tuning since it enhances the amplitude of the driving electric field inside the LN photonic-crystal cavity. Lithium Niobate Nonlinear Thermal Waveguide MODE Automation API Nonlinear Optics Photonic Integrated Circuits - Active Computing Second-harmonic generation (SHG) in a Lithium Niobite - LiNbO3 (LNO) nanophotonic waveguide is studied using temperature modulation to achieve efficient phase matching. Rao, A. et al. Lett. Ghelfi, P. et al. CAS The devices exhibit a significant tuning efficiency up to 1.98 GHz V -1, a broad modulation bandwidth of 17.5 GHz, while with a tiny electro-optic modal volume of only 0.58 m 3. 35, 346396 (2017). The high quality of device fabrication as indicated by the device images implies high performance of the EOM, as we will show below. Photon. IEEE J. Sel. The 50-m width of the electrode (Fig. a, Set-up for measuring the modulator electro-optic responses from 35GHz to 100GHz. Di Zhu, and Mengjie Yu, from SEAS, Hannah R. Grant, Leif Johansson from Freedom Photonics and Lingyan He and Mian Zhang from HyperLight Corporation. IEEE Sel Top. Nat. & Lin, Q. High-Q 2D lithium niobate photonic crystal slab nanoresonators. 110 GHz CMOS compatible thin film LiNbO3 modulator on silicon. 3 Electrical eye diagram at 100Gbaud. https://doi.org/10.1038/s41467-020-17950-7, DOI: https://doi.org/10.1038/s41467-020-17950-7. The green region indicates the electrode that can be shrunk to in the future design. To maximize the electro-optic interaction, we utilize a partially etched structure with a rib-waveguide-like cross-section, leaving a 150-nm-thick wing layer for the electrodes to sit on (Fig. That highlighted in blue indicates the large metal pad used for contacting the RF probe. Electron. The research was co-authored by Dylan Renaud, Rebecca Cheng, Linbo Shao. Thin-lm lithium niobate on insulator (LNOI) platform. The researchers combined the laser with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. Top. High-speed Femto-Joule per bit silicon-conductive oxide nanocavity modulator. Express 19, 75307536 (2011). Integrated lithium niobate photonics is a promising platform for the development of high-performance chip-scale optical systems, but getting a laser onto a lithium niobate chip has proved to be one of the biggest design challenges, said, , the Tiantsai Lin Professor of Electrical Engineering and Applied Physics at SEAS and senior author of the study. 6c, where a driving power of 16mW (corresponding peak-to-peak driving voltage, Vpp, of Vpp=2.5V) splits the cavity resonance into five with notable magnitudes (black curve), resulting in a cavity transmission with five side lobes (blue curve). and M.L. J. Lightwave Technol. Further increase of the modulation frequency shifts apart the two side lobes accordingly, with amplitude decreased, while the position of the center lobe remains unchanged, as expected from the non-adiabatic driving. PubMedGoogle Scholar. To obtain Extended Data Fig. A notable decrease of optical Q is not observed until the gap is reduced to below 2.3m. increased the EO modulation efficiency to a voltage-length product of 1.75 Vcm using a shallowly etched lithium niobate waveguide. Xu, Q., Schmidt, B., Pradhan, S. & Lipson, M. Micrometre-scale silicon electro-optic modulator. 1541959. Karpiski, M., Jachura, M., Wright, L. J. Notomi, M., Nozaki, K., Shinya, A., Matsuo, S. & Kuramochi, E. Toward fJ/bit optical communication in a chip. 1e) is still able to produce a well-confined point-defect cavity, with a simulated optical Q of ~105 for the fundamental transverse-electric-like (TE-like) cavity mode, \({\mathrm{{TE}}}_{01}^{0}\), shown in Fig. a Full SEM image of the whole-device structure. Nat. Electron. Bonded thin film lithium niobate modulator on a silicon photonics platform exceeding 100 GHz 3-dB electrical modulation bandwidth. This is a preview of subscription content, access via your institution. Cite this article. Chen, X. et al. Low-loss plasmon-assisted electro-optic modulator. Micro-transfer printing of thin-film lithium niobate offers a solution, but suspending large areas of thin films for long interaction lengths and high-Q resonators is challenging, resulting in a low transfer . Lu, H. et al. 42.70.a. Reed, G. T., Mashanovich, G., Gardes, F. Y. Now, researchers from the Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS) in collaboration with industry partners at Freedom Photonics and HyperLight Corporation, have developed the first fully integrated high-power laser on a lithium niobate chip, paving the way for high-powered telecommunication systems, fully integrated spectrometers, optical remote sensing, and efficient frequency conversion for quantum networks, among other applications. https://doi.org/10.1038/s41586-018-0551-y, Complementary Metal Oxide Semiconductor (CMOS). In this research, we used all the nano-fabrication tricks and techniques learned from previous developments in integrated lithium niobate photonics to overcome those challenges and achieve the goal of integrating a high-powered laser on a thin-film lithium niobate platform., Harvards Office of Technology Development. volume562,pages 101104 (2018)Cite this article. Opt. npj Quantum Information Google Scholar. carried out the device characterization. Low power 50Gb/s silicon traveling wave MachZehnder modulator near 1300nm. Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. Numerical simulations show that the device exhibits a small capacitance C of C=~22fF, which is more than one order of magnitude smaller than other LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26. Wang, C., Zhang, M., Chen, X. et al. Express 27, 1985219863 (2019). This value is the smallest switching energy ever reported for LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26, clearly showing the high energy efficiency of our devices. CAS High-performance and linear thin-film lithium niobate Mach-Zehnder modulators on silicon up to 50 GHz. and S.C. carried out the device characterization. 94, 241107 (2009). Lithium niobate photonic-crystal electro-optic modulator, https://doi.org/10.1038/s41467-020-17950-7. For EOM, we adopt one-dimensional photonic-crystal nanobeam as the basic underlying structure (Fig. We first assess the performance of our high symbol rate transmitter . This is a typical signature of resonance modulation in the sideband-unresolved regime, where the cavity resonance follows adiabatically the electric driving signal in a sinusoidal fashion, resulting in a broadened average transmission spectrum (Fig. Rep. 7, 46313 (2017). 8b, c. However, Fig. Wang, C., Zhang, M., Stern, B., Lipson, M. & Lonar, M. Nanophotonic lithium niobate electro-optic modulators. supervised the project. Here we overcome these limitations and demonstrate monolithically integrated lithium niobate electro-optic modulators that feature a CMOS-compatible drive voltage, support data rates up to 210 gigabits per second and show an on-chip optical loss of less than 0.5 decibels. Recently, thin-film lithium niobate (LN) emerges as a promising platform for photonic integrated circuits. Although attempts have been made to explore the electro-optic effect in LN photonic crystals40,41,42, the low device quality and poor optoelectronic integration unfortunately limit seriously the operation speed. One-dimensional photonic-crystal nanobeams exhibit exceptional capability of controlling light confinement. & Thomson, D. J. Express 23, 2352623550 (2015). 4, e255 (2015). The demonstration of energy efficient and high-speed electro-optic modulation at the wavelength scale paves a crucial foundation for realizing large-scale LN photonic integrated circuits that are of immense importance for broad applications in data communication, microwave photonics, and quantum photonics. Therefore, we expect our devices to have much higher energy efficiency, as will be shown in the following sections. Optica 6, 860863 (2019). Ayata, M. et al. The energy efficiency of the LN photonic-crystal EOM can be further improved since our current devices are not optimized. High-performance and linear thin-film lithium niobate MachZehnder modulators on silicon up to 50GHz. 1d and8a). The measured electrical BER is 3.6105, limited by the signal distortion from the electronic circuit. Opt. Alloatti, L. et al. Nat. 28, 736739 (2016). e Lattice constant a as a function of position, which is optimized for low insertion loss together with high radiation-limited optical Q. f Top view of the FEM-simulated optical mode field profile of the fundamental TE-like cavity mode \({\mathrm{{TE}}}_{01}^{0}\). . a Schematic of half of the cross-section of the EOM structure. Zhang, X. et al. Nature 528, 534538 (2015). 1a), where an injector section (Fig. Photon-level tuning of photonic nanocavities. Integrating high-performance plug-and-play lasers would significantly reduce the cost, complexity, and power consumption of future communication systems, said Amirhassan Shams-Ansari, a graduate student at SEAS and first author of the study. Wang, C. et al. the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in Express 26, 15471555 (2018). To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. Opt. A conventional modulator (b) also uses a buffer oxide layer for velocity matching, but on top of LN which further compromises the electro-optic overlap. Laser. Correspondence to In the past decade, photonic-crystal EOMs have been developed on various material platforms such as silicon32,33,34, GaAs35, InP36, polymers37,38, ITO39, etc. All-plasmonic MachZehnder modulator enabling optical high-speed communication at the microscale. HDTRA11810047); and the Defense Advanced Research Projects Agency (DARPA) under Agreement No. In summary, we have demonstrated high-speed LN EOMs with a broad modulation bandwidth of 17.5GHz, a significant tuning efficiency up to 1.98GHzV1, and an electro-optic modal volume as small as 0.58m3. Waveguide-integrated, ultralow-energy GeSi electro-absorption modulators. The gray curves show the created individual sidebands with Lorentzian-shape resonances and the dashed vertical lines indicates their relative frequency positions. a Schematic of the LN photonic-crystal EOM. Therefore, the electrodes can be shrunk to 103m2, which would reduce the capacitance considerably to ~0.27fF (~1.0fF if including the integrated wires36), according to our FEM simulations. This mode, however, has only negligible perturbation to the dielectric mode due to distinctive spatial symmetry, thus not affecting the quality of the defect cavity mode. 27), which is about 22fJ per bit in our EOM. The images or other third party material in this article are included in the articles Creative Commons license, unless indicated otherwise in a credit line to the material. Deep learning with coherent nanophotonic circuits. Now, researchers from the Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS) in collaboration with industry partners at Freedom Photonics and HyperLight Corporation, have developed the first fully integrated high-power laser on a lithium niobate chip, paving the way for high-powered telecommunication systems. Express 20, 2246522474 (2012). Lu, H. et al. ADS & Lin, Q. Quantum correlations from dynamically modulated optical nonlinear interactions. 16, 18 (2018). Correspondence to We propose and demonstrate a Mach-Zehnder modulator in Z-cut lithium niobate thin film (LNTF) with a vertical electric field structure. He, M. et al. After the residue removal, we used diluted hydrofluoric acid to undercut the buried oxide layer to form a suspended photonic-crystal membrane structure (Fig. Nature 528, 534538 (2015). & Fan, S. Synthetic space with arbitrary dimensions in a few rings undergoing dynamic modulation. The equipment in the highlighted dashed box is used for characterizing the performance of electro-optic modulation. As an example, a gap of ~1.5m would not only result in an optical Q of ~5000 that helps increase the operation bandwidth to ~45GHz, but also improve the electro-optic tuning efficiency by about 31% to 2.38GHzV1, as highlighted in blue in Fig. Nat. Enhanced electro-optic lithium niobate photonic crystal wire waveguide on a smart-cut thin film. As an example application, we applied NRZ signal with a (271)-bit pseudo-random binary sequence (PRBS) to an EOM with a Vpp of 2.0V. Figure7b, c shows the recorded eye diagrams at two different bit rates of 9 and 11Gbs1, respectively, which show clear open eyes. Photon. Miller, D. A. Nature Photon. Loncar is a cofounder of HyperLight Corporation, a startup which was launched to commercialize integrated photonic chips based on certain innovations developed in his lab. Nature 507, 341345 (2014). g Simulated optical mode field profile of the second-order TE-like cavity mode \({\mathrm{{TE}}}_{01}^{1}\). To characterize the optical and electro-optic properties of the devices, a continuous-wave tunable laser (Santec TSL-510) was launched onto the chip via a lensed fiber. Femtojoule electro-optic modulation using a silicon-organic hybrid device. Here we report high-speed and energy-efficient LN photonic-crystal EOMs, which exhibits a tiny electro-optic modal volume of only ~0.58m3, the smallest among all high-speed LN EOMs ever reported1,13,14,15,16,17,18,19,20,21,22,23,24,25,26, to the best of our knowledge. The red solid and open circles denote the fundamental and second-order TE-like cavity modes shown in f and g. Our simulations show that there exhibits another mode with eigenfrequency within the band gap (gray open circles). Here, we present a heterogeneously integrated EOM based on the lithium niobate-on-insulator (LNOI) platform. This work was performed in part at the Cornell NanoScale Facility, a member of the National Nanotechnology Coordinated Infrastructure (National Science Foundation, ECCS-1542081). HR00112090012. J. Lightwave Technol. Recently, thin-film monolithic LN11,12 emerges as a promising platform, where low-loss and high-quality photonic integration together with the strong Pockels effect enables superior modulation performance13,14,15,16,17,18,19,20,21,22,23,24,25,26, showing great potential as an excellent medium for photonic integrated circuits and future photonic interconnect. supervised the project. Get the most important science stories of the day, free in your inbox. A variety of approaches have been employed for electro-optic modulation, such as carrier plasma dispersion6,7, electro-absorption8,9, and Pockels effect1,10, the latter of which is particularly interesting since the Pockels effect offers an ultrafast and pure refractive-index modulation over an extremely broad optical spectrum while without introducing extra loss. Loncar is a cofounder of HyperLight Corporation, a startup which was launched to commercialize integrated photonic chips based on certain innovations developed in his lab. M.L., J.L., and Y.H. Photonics 4, 518526 (2010). Its a building block that can be integrated into larger optical systems for a range of applications, in sensing, lidar, and data telecommunications.. High-speed Pockels modulation and second-order nonlinearities are key components in optical systems, but CMOS-compatible platforms like silicon and silicon nitride lack these capabilities.
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